4 ECTS credits
110 h study time
Offer 1 with catalog number 4016818FNR for all students in the 2nd semester at a (F) Master - specialised level.
1. Overview of the important technological steps in the manufacturing of micro- and nano-devices.
2. Detailed treatment of such steps:
- Methods to obtain high purity materials.
- Mono crystalline growth
- Doping of crystals
- Manufacturing of substrates
- Electron beam systems and the manufacturing of masks and photolithography
- Dimensioning devices (geometrical factors)
- Epitaxy techniques (CVD, MBE and MOCVD)
- Surface doping methods: diffusion and ion implantation
- Atomic layer deposition
- Physical vapor deposition: metallization, dielectrics, silicidation: evaporation, e-beam and sputtering (DC, AC, magneto-)
- Etching (wet and dry etching: wet chemical, physical (ion beam milling), dry chemical (plasma and reactive ion etching))
- Laser ablation
3. Physics and technology of some basic semiconductor electronic and optoelectronic devices:
- bipolar transistor
- self aligned gate MOSFET and CMOS
- optical detector
- solar cell
- LED (including OLED)
4. Practical sessions: Simulation of technological processes (TCAD)
1. Written lecture notes are available on Poincaré and at the ETRO Department
2. Complementary study material:
i) VLSI Technology; Simon M. Sze; Ed.: McGraw Hill, 1983
ii) An introduction to semiconductor technology; D. V. Morgan and K. Board ; Ed. : John Wiley, 2nd edition, 1990
iii) Semiconductor Manufacturing Technology Michail Quirk & Julian Serda, Ed.: Prentice Hall 2001
iv) Basic Integrated Circuit Engineering, D.J. Hamilton & W.G. Howard, McGraw Hill, 1975
v) Fundamentals of Semiconductor Fabrication; Gary S. May and Simon S. Sze; Ed.: John Wiley, 2004
vi) Semiconductor Devices, Physics and Technology, S. M. Sze & M-K Lee Ed.: John Wiley, 3rd Ed. 2013
vii) Principles of solar cells, LEDs and diodes; Adrian Kitai; Ed.: John Wiley, 2011
Competences that are to be acquired:
To have a sound knowledge of the physics of technological processes that are being used to produce electronic and optoelectronic solid state devices. To acquire a basic knowledge of the physics of semiconductor optoelectronic devices. To be able to bring together technological steps or processes into a technology to produce a device with certain properties.
The final grade is composed based on the following categories:
Other Exam determines 100% of the final mark.
Within the Other Exam category, the following assignments need to be completed:
1. An oral closed book examination concerning the physics of technology and processing. Attention is not only given to the reproduction of the theoretical content, but also and predominantly to the deeper understanding via e.g. a confrontation with novel techniques, devices and technologies. The student is in principle asked two main questions: one quantitative and one qualitative. Especially the second type allows probing for understanding and feeling. The student is offered to prepare his answers first on paper; then follows the oral examination and a discussion about related topics.
2. A written report about the work performed during the practical sessions, supplemented by an oral examination about the contents of the report.
The examination on the theoretical part of the course accounts for 2/3 of the final mark; the report and the examination about the practical sessions account for 1/3.
This offer is part of the following study plans:
Master of Photonics Engineering: On campus traject
Master of Photonics Engineering: Online/Digital traject