4 ECTS credits
110 u studietijd

Aanbieding 1 met studiegidsnummer 4016818FNR voor alle studenten in het 2e semester met een gespecialiseerd master niveau.

Semester
2e semester
Inschrijving onder examencontract
Niet mogelijk
Beoordelingsvoet
Beoordeling (0 tot 20)
2e zittijd mogelijk
Ja
Onderwijstaal
Engels
Onder samenwerkingsakkoord
Onder interuniversitair akkoord mbt. opleiding
Faculteit
Faculteit Ingenieurswetenschappen
Verantwoordelijke vakgroep
Elektronica en Informatica
Onderwijsteam
Roger Vounckx (titularis)
Onderdelen en contacturen
18 contacturen Hoorcollege
18 contacturen Werkcolleges, practica en oefeningen
Inhoud

1. Overview of the important technological steps in the manufacturing of micro- and nano-devices.

2. Detailed treatment of such steps:

- Methods to obtain high purity materials.

- Mono crystalline growth

- Doping of crystals

- Manufacturing of substrates

- Electron beam systems and the manufacturing of masks and photolithography

- Dimensioning devices (geometrical factors)

- Oxidation

- Epitaxy techniques (CVD, MBE and MOCVD)

- Surface doping methods: diffusion and ion implantation

- Atomic layer deposition

- Physical vapor deposition: metallization, dielectrics, silicidation: evaporation, e-beam and sputtering (DC, AC, magneto-)

- Etching (wet and dry etching: wet chemical, physical (ion beam milling), dry chemical (plasma and reactive ion etching))

- Laser ablation

3. Physics and technology of some basic semiconductor electronic and optoelectronic devices:

- bipolar transistor

- self aligned gate MOSFET and CMOS

- optical detector

- solar cell

- LED (including OLED)

4. Practical sessions: Simulation of technological processes (TCAD)

Studiemateriaal
Digitaal cursusmateriaal (Vereist) : Physics of Semiconductor Technologies and Devices, R. Vounckx, Pointcarré
Handboek (Aanbevolen) : Understanding semiconductor devices, Sima Dimitrjiev, BIB, 9780195131864, 2001
Handboek (Aanbevolen) : An introduction to semiconductor microtechnology, D. V. Morgan and K. Board, 2nd, BIB, 9780471924784, 1990
Handboek (Aanbevolen) : Introduction to Semiconductor Manufacturing Technology, Physics and Technology, Hong Xiao, 3rd Edition, BIB, 9780130224040, 2013
Handboek (Aanbevolen) : Fundamentals of Semiconductor Fabrication, Gary S. May and Simon S. Sze, John Wiley, 9780471232797, 2004
Handboek (Aanbevolen) : Principles of solar cells, LEDs and diodes, Adrian Kitai, 2de, John Wiley, 9781119451020, 2018
Bijkomende info

Study material

1. Written lecture notes are available on Poincaré and at the ETRO Department

2. Complementary study material:

i) VLSI Technology; Simon M. Sze; Ed.: McGraw Hill, 1983

ii) An introduction to semiconductor technology; D. V. Morgan and K. Board ; Ed. : John Wiley, 2nd edition, 1990

iii) Semiconductor Manufacturing Technology Michail Quirk & Julian Serda, Ed.: Prentice Hall 2001

iv) Basic Integrated Circuit Engineering, D.J. Hamilton & W.G. Howard, McGraw Hill, 1975

v) Fundamentals of Semiconductor Fabrication; Gary S. May and Simon S. Sze; Ed.: John Wiley, 2004

vi) Semiconductor Devices, Physics and Technology, S. M. Sze & M-K Lee Ed.: John Wiley, 3rd Ed. 2013

vii) Principles of solar cells, LEDs and diodes; Adrian Kitai; Ed.: John Wiley, 2011

Leerresultaten

Algemene competenties

Competences that are to be acquired:

To have a sound knowledge of the physics of technological processes that are being used to produce electronic and optoelectronic solid state devices. To acquire a basic knowledge of the physics of semiconductor optoelectronic devices.  To be able to bring together technological steps or processes into a technology to produce a device with certain properties.

Beoordelingsinformatie

De beoordeling bestaat uit volgende opdrachtcategorie√ęn:
Examen Andere bepaalt 100% van het eindcijfer

Binnen de categorie Examen Andere dient men volgende opdrachten af te werken:

  • exam met een wegingsfactor 1 en aldus 100% van het totale eindcijfer.

    Toelichting: 1. Oral exam about the lectures: 2/3 of the total score:
    An oral closed book examination concerning the physics of technology and processing. Attention is not only given to the reproduction of the theoretical content, but also and predominantly to the deeper understanding via e.g. a confrontation with novel techniques, devices and technologies. The student is in principle asked two main questions: one quantitative and one qualitative. Especially the second type allows probing for understanding and feeling. The student is offered to prepare his answers first on paper; then follows the oral examination and a discussion about related topics.


    2.Written report during the lab sessions + oral questioning about the report: 1/3 of the total score:
    A written report about the work performed during the practical sessions, supplemented by an oral examination about the contents of the report.

Aanvullende info mbt evaluatie

1. An oral closed book examination concerning the physics of technology and processing. Attention is not only given to the reproduction of the theoretical content, but also and predominantly to the deeper understanding via e.g. a confrontation with novel techniques, devices and technologies. The student is in principle asked two main questions: one quantitative and one qualitative. Especially the second type allows probing for understanding and feeling. The student is offered to prepare his answers first on paper; then follows the oral examination and a discussion about related topics.

2. A written report about the work performed during the practical sessions, supplemented by an oral examination about the contents of the report.

The examination on the theoretical part of the course accounts for 2/3 of the final mark; the report and the examination about the practical sessions account for 1/3.

Toegestane onvoldoende
Kijk in het aanvullend OER van je faculteit na of een toegestane onvoldoende mogelijk is voor dit opleidingsonderdeel.

Academische context

Deze aanbieding maakt deel uit van de volgende studieplannen:
Master of Photonics Engineering: On campus traject (enkel aangeboden in het Engels)
Master of Photonics Engineering: Online/Digital traject (enkel aangeboden in het Engels)