4 ECTS credits
110 u studietijd
Aanbieding 1 met studiegidsnummer 4020328FNR voor alle studenten in het 2e semester met een gespecialiseerd master niveau.
1. Overview of the important technological steps in the manufacturing of micro- and nano-devices.
2. Detailed treatment of such steps:
- Methods to obtain high purity materials.
- Mono crystalline growth
- Doping of crystals
- Manufacturing of substrates
- Electron beam systems and the manufacturing of masks and photolithography
- Dimensioning devices (geometrical factors)
- Oxidation
- Epitaxy techniques (CVD, MBE and MOCVD)
- Surface doping methods: diffusion and ion implantation
- Atomic layer deposition
- Interconnects: metallization, dielectrics deposition for wave guiding, silicidation
- Etching (chemical, physical methods)
- Laser ablation
3. Physics and technology of some basic semiconductor optoelectronic devices:
- detector
-solar cell
- LED (including OLED)
-imaging sensors: CCD and CMOS
4. Practical sessions: Simulation of technological processes (TCAD)
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To have a sound knowledge of the physics of technological processes that are being used to produce electronic, optoelectronic and photonic solid state devices. To acquire a basic knowledge of the physics of semiconductor optoelectronic devices. To be able to bring together technological steps or processes into a technology to produce a device with certain properties.
De beoordeling bestaat uit volgende opdrachtcategorieën:
Examen Andere bepaalt 100% van het eindcijfer
Binnen de categorie Examen Andere dient men volgende opdrachten af te werken:
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Deze aanbieding maakt deel uit van de volgende studieplannen:
Master in de ingenieurswetenschappen: fotonica: Standaard traject